超精密位移测量系统是光刻机不可或缺的关键分系统之一，而基于激光外差干涉技术的超精密位移测量系统同时具备亚纳米级分辨率、纳米级精度、米级量程和数米每秒的测量速度等优点，是目前唯一能满足光刻机要求的位移测量系统。目前应用于光刻机的超精密位移测量系统主要有双频激光干涉仪和平面光栅测量系统两种，二者均以激光外差干涉技术为基础。本文将分别对这两种测量系统的原理、优缺点以及在光刻机中的典型应用进行阐述。

硫系玻璃具有超高的非线性极化率和超短的非线性响应时间，良好的热稳定性、化学稳定性以及易成纤成膜的特性使之成为优良的红外光学材料，在红外光子学领域受到了广泛的关注。从玻璃组分、微晶化处理、光辐照三方面综述了硫系玻璃三阶光学非线性方面的最新研究进展，并对现有硫系玻璃的三阶非线性研究现状进行总结与展望。

作为一种超精密的非接触式测量设备，双频激光干涉测量系统可以在保证纳米级测量精度的情况下实现大范围和高速度测量，因而获得非常广泛的用途。环境是影响激光干涉测量系统测量精度的最大因素，为了获得纳米测量精度，必须对测量环境进行补偿。因此，重点研究了环境补偿技术，并研制了一种新型波长跟踪器，与Edlen经验公式进行对比测试，结果表明新型波长跟踪器具有良好的补偿效果。采用自制波长跟踪器补偿之后，被测运动台伺服精度可达1.61 nm。

A micro-Gal absolute gravimeter based on high-precision and high-stability heterodyne interferometer is presented. The distance measuring technology of the gravimeter is studied in detail. The experimental results of distance measuring for a free-falling motion show that the high-precision heterodyne interferometer described in this paper can meet the demand of a micro-Gal absolute gravimeter with relative uncertainty of 6.4*10^(-9). Moreover, the heterodyne interferometer is more stable than the Mach-Zehnder interferometer (MZI) which is widely used in present absolute gravimeters.

There is an increasing demand on the measurable velocity of laser interferometer in manufacturing technologies. The maximum measurable velocity is limited by frequency difference of laser source, optical configuration, and electronics bandwidth. An experimental setup based on free falling movement has been demonstrated to measure the maximum measurable velocity for interferometers. Measurement results show that the maximum measurable velocity is less than its theoretical value. Moreover, the effect of kinds of factors upon the measurement results is analyzed, and the results can offer a reference for industrial applications.

A new technology of lightning location is described, which is based on detecting the state of polarization (SOP) fluctuation of the laser light in the optic ground wire (OPGW). Compared with the conventional lightning location method, the new method is more accurate, more stable, and cheaper. Theories of Stokes parameters and Poincare sphere are introduced to analyze the SOP at the lightning strike point. It can be concluded that although the initial points of SOP on the Poincare sphere are random, the SOP fluctuation generated by lightning strike can still be accurately identified by detecting the velocity of polarization motion. A new algorithm to quantify the velocity is also introduced.